Particle adhesion is a frequently encountered issue in workpieces with higher water repellency than silicon wafers, such as image sensors with a resin film attached. StayClean-A prevents the workpiece from drying out, and substantially lowers the adhesion of particles by impairing their settling speed.
StayClean-A does not include any regulated chemicals, such as substances covered under the RoHS directive or PFOS. Furthermore, StayClean-A can be used in the same environment※ as normal dicing.
※If your cutting water is being circulated, please contact your DISCO sales representative.
StayClean-A lowers the settling speed of the contamination and prevents adhesion by creating rising air bubbles in the cutting water.
*Nozzle + side flow nozzle + chuck table water curtain
By using the injector developed exclusively for StayClean, stable supply is possible even at concentrations more dilute than one part per thousand.
|Solution appearance||-||Transparent colorless and light yellow liquid|
|Main ingredient||-||Nonionic surfactant + water soluble polymer macromolecule|
|pH（undiluted）||pH||7.5 - 9.5|
|Density（15℃）||g/cm3||1.0 - 1.02|
|Residue/decomposition||mg/L||COD 56(JIS K0102-17)|
|(when diluted 1000 times)||mg/L||BOD 62(JIS K0102-21)|
|Recommended dilution||times||1,000 - 2,000(0.1 - 0.05%)|
|Power supply , voltage||V||AC90-230 Single Phase 50/60 Hz|
|Supply water temperature||deg C||20 - 25|
|Supply water pressure||MPa||0.2 - 0.5|
|Process flow rate||L/min||2 - 20|
|Additive injection rate||%||0.1 - 0.01(1,000 - 100 ppm)|
|Machine dimensions(W×D×H)||mm||Injector 200 × 300 × 500 excluding projections
Bottle stocker 357 × 392 × 440 excluding projections
|Machine weight||kg||Injector Approximately.22(Dry mass)
Bottle stocker Approximately.10(Dry mass)
Cautions before using StayClean-A
Cautions regarding the use of StayClean-A
Cautions regarding StayClean-A storage