By optimizing the frame structure and handling section layout, the footprint is on par with that of DISCO’s semi-automatic unit (DAD3350), even though it is equipped with all the functions of a fully automatic unit (size reduced by about 20% from the DFD641). The equipment is designed to reduce energy and air consumption, contributing to lower operation costs and environmental impact. In addition, the condition monitor relays the processing status and key equipment information in real time for use in periodic inspections and process management.
DFD6240 offers highly consistent and dependable cut quality through the new Synchro Spindle™ for superior radial rigidity. The cutting water flow rate controller, programmable via the touch-panel display, sets the flow rate for each process recipe. Atomizing nozzle technology (option, patented in the USA, Japan, and other countries) is available for the wheel cover, where it effectively reduces particle adhesion, and the spinner cleaning unit, where it yields exceptionally clean wafers after dicing.
Spindle shaft-lock feature and auto-open/close wheel cover (accessible from the equipment front) make blade replacement quick and easy. In addition, operation is simplified through adoption of the LCD touch panel and GUI (Graphical User Interface).
Increased speed ranges and return speeds for the equipment axes contributes to improved dicing throughput.
A 1.2 kW high-rigidity spindle is installed as a standard specification. In addition, the adoption of center thrust design makes it possible to support workpieces with high processing loads, including glass, ceramics, and other materials, using the 1.8 kW (option, compatible with 2” blades) or 2.2 kW spindle (option, compatible with 3” blades) with improved rigidity.
|Specification||Unit||1.2, 1.8 kW||2.2 kW|
|Max. workpiece size||-||Φ8 inch|
|Cutting speed||mm/s||0.1 ～ 600|
|Positioning accuracy||mm||Within 0.003/210
(Single error) Within 0.002/5
|Z-axis||Max. stroke||mm||19.22 (For Φ2 inch blade)||19.9 (For Φ3 inch blade)|
|θ-axis||Max. rotating angle||deg||380|
|Spindle||Rated torque||N・m||0.19（1.2 kW）
|Revolution speed range||min‐1||6,000 ～ 60,000||3,000 ～ 30,000|
|Machine dimensions(W×D×H)||mm||900 × 1,190 × 1,800|
|Machine weight||kg||Approx. 1,200|
*Product appearance, features, specifications, and other details may change due to technical
*Please read the standard specification sheet thoroughly before use.
|Machine dimentions（W × D × H）|
|Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic|
|1,180 × 1,110 × 1,850||1,180 × 1,080 × 1,820||1,200 × 1,550 × 1,800||1,200 × 1,550 × 1,800||1,200 × 1,550 × 1,800||1,120 × 1,500 × 1,600||1,240 × 1,550 × 1,960||1,240 × 1,550 × 1,800||1,510 × 1,554 × 1,800||1,200 × 1,900 × 1,800|