Ultrasonic dicing, which was developed as a process to support electric parts (ceramics) and optical parts (optical glass prisms, filters, etc.), improves the processability of difficult-to-process materials including glass and ceramics which are difficult to process using blade dicing.
Various problems occurred with blade dicing for difficult-to-process materials, including glass, ceramics, metal, and resin.
To solve these issues for difficult-to-process materials, ultrasonic dicing was developed.
In ultrasonic dicing, a dedicated Φ2-inch blade with built-in ultrasonic oscillator is used. This dedicated blade has a slit on the hub. The blade edge vibrates outward from the center without transmitting vibration to the spindle itself, and the blade outer diameter expands and contracts.(Fig. 1)
Fig. 1. Ultrasonic vibration generation mechanism
Ultrasonic vibration causes the blade to expand and contract towards the center, causing the abrasive grit to repeatedly collide with the workpiece with high acceleration in a short time (Fig. 2). As a result, a fracture layer is generated in the direction of the blade center, which reduces the processing load significantly.
In addition, since this vibration creates a gap between the blade and the workpiece, abrasive grit cooling conditions greatly improve, and processing quality and blade life is improved by preventing blade loading and glazing.
Fig. 2. Ultrasonic dicing process mechanism
General cutting process
There are numerous advantages as a result of lowering the process load and improving grit cooling conditions
In order to perform ultrasonic dicing, an ultrasonic oscillation power supply, amplitude measurement unit, dedicated mount and cap, and dedicated software are necessary. They are referred to as whole as the ultrasonic dicing unit. This can be installed on not only new equipment, but also equipment already in use through on-site retrofitting. You can also select resin, metal, or electroformed blade bond types, just like with standard blades. We are prepared to meet a variety of customer demands.
Compatible with DAD3000 series and DFD6000 series dicing saws.
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A free-of-charge test cut is performed at an application lab to confirm whether achieving the customer's needs is possible.
Dicing and Grinding Service
It is effective in sample and prototype manufacturing during development or low-volume production. Designated engineers will provide support based on the desired leadtime and at reasonable cost.