The CO2 Injector lowers the resistivity of purified water by dissolving carbon dioxide gas into the dicing cutting water. Once the user-set resistivity is reached, the CO2 Injector maintains this level with a high degree of accuracy. By lowering the degree of static charge the workpiece acquires during cutting, the CO2 Injector helps prevent particle adhesion and device damage caused by static electricity.
The CO2 Injector was designed especially for dicing saws, in which, owing to processing requirements, the flow rate of cutting water is extremely variable. Thanks to the feedback control using the resistivity sensor and the multi-stage mixing system, which adjusts carbon dioxide concentration in two stages, the resistivity can be adjusted very accurately. When cutting water is turned on or off, the variation in resistivity generally becomes particularly larger. However, with the CO2 injector, stability can be maintained, so that the constant discharge of cutting water is no longer necessary.
The CO2 Injector is easily controlled through the dicing saw interface, allowing for real-time monitoring of cutting water flow and resistivity during cutting. Settings for alarm activation or process termination can be configured to protect yield when user-specified tolerances are exceeded.
The CO2 Injector may be set to log resistivity measurements automatically when dicing saw functions are initiated, when the dicing of each wafer is complete, and when an alarm is activated. This logging function can be a valuable contributor to process quality design and management.
The CO2 Injector fits neatly within the case of the DFD6240, DFD6340/6341, DFD6361/6362/6363, and DFD6450.
|Specification||Unit||Standard specification||Low-resistivity specification|
|Flow rate||L/min||3 ～ 15|
|Resistivity setting range||MΩ・cm||0.5 ～ 1.0||0.2 ～ 0.6|
|Resistivity fluctuation range※||Within targeted specific resistance ±10 %||Within targeted specific resistance ±0.06 MΩ•cm|
|Deionized water supply pressure||MPa||0.2 ～ 0.5|
|Coolant temperature||Deg C||20 ～ 25|
|CO2consumption||g/h||Refer to the attached table|
|Machine dimensions (W×D×H)||mm||328 × 178 × 365|
*The flow rate is constant within the range from 3 to 15 L/min at the supply water temperature from 20 to
Note: This machine does not include a CO2 gas cylinder and cylinder stand
|1.0 MΩ･cm||0.7 MΩ･cm||0.5 MΩ･cm|
|0.6 MΩ･cm||0.4 MΩ･cm||0.2 MΩ･cm|
*Product appearance, features, specifications, and other details may change due to technical
*Please read the standard specification sheet thoroughly before use.