Application processing examples
The IR (Infrared) camera is a camera using infrared rays. Infrared rays have a longer wavelength compared with visible light. Therefore, it is difficult to scatter and possible to take a picture by penetrating silicon or other material and to perform alignment from the backside. The IR camera can be installed to DISCO equipment as an option or as a DPR part.
Depending on the mounting combination, for example, Si + Si or Si + Glass, an IR camera is used to perform alignment on the workpiece with no pattern on the side being ground.
The following are photographs taken using the standard and IR cameras of a 0.3 mm thick patterned wafer with the patterned side mounted downward.
Photo 1: Standard camera
Photo 2: IR camera
Note: There is a wrong and right way to use an IR camera depending on the workpiece thickness and material. Please feel free to contact your DISCO sales representative concerning this.
A free-of-charge test cut is performed at an application lab to confirm whether achieving the customer's needs is possible.
Dicing and Grinding Service
It is effective in sample and prototype manufacturing during development or low-volume production. Designated engineers will provide support based on the desired leadtime and at reasonable cost.