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Alignment using an IR Camera

Application processing examples

The IR (Infrared) camera is a camera using infrared rays. Infrared rays have a longer wavelength compared with visible light. Therefore, it is difficult to scatter and possible to take a picture by penetrating silicon or other material and to perform alignment from the backside. The IR camera can be installed to DISCO equipment as an option or as a DPR part.

Process Example

Depending on the mounting combination, for example, Si + Si or Si + Glass, an IR camera is used to perform alignment on the workpiece with no pattern on the side being ground.


The following are photographs taken using the standard and IR cameras of a 0.3 mm thick patterned wafer with the patterned side mounted downward.

  • Photo 1: Standard camera

    Standard camera
  • Photo 2: IR camera

    IR camera

Note: There is a wrong and right way to use an IR camera depending on the workpiece thickness and material. Please feel free to contact your DISCO sales representative concerning this.


Please feel free to contact us with any questions or inquiries.